Liquid crystal over silicon SLM micro-mirror fabrication using chemical mechanical planarisation

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	in print
Journal	IEEE Transactions on Electron Devices
Publication status	Published - 2000

Cite this

@article{0cbf36a4066e42dba4853ff4382acd68,

title = "Liquid crystal over silicon SLM micro-mirror fabrication using chemical mechanical planarisation",

author = "Calton, \{D. W.\} and K. Seunarine and Tom Stevenson and Ian Underwood",

year = "2000",

language = "Undefined/Unknown",

pages = "in print",

journal = "IEEE Transactions on Electron Devices",

issn = "1557-9646",

publisher = "Institute of Electrical and Electronics Engineers",

}