Abstract
Layer guided surface aoustic wave devices fabricated on ST-cut quartz are presented, having an S1813 photoresist guiding layer constructed only over the transducers. Experimental data is shown comparing devices with complete and so-called dasiasectionalpsila guiding layers both possessing enhanced mass sensitivity over a bare surface skimming bulk wave device. Sensitivity to rigid mass and viscous loading is demonstrated using gold deposition and water-glycerol mixtures. Protein adsorption was also followed using the sectional guiding layer devices. Advantages of sectional wave-guided sensors having a free propagation path are discussed.
Original language | English |
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DOIs | |
Publication status | Published - 9 Sept 2008 |
Keywords / Materials (for Non-textual outputs)
- acoustic propagation
- acoustic sensors
- gold
- polymers
- proteins
- resists
- surface acoustic wave devices