Love wave sensors: Sectional guiding layers

P. Roach, M. I. Newton, G. McHale

Research output: Contribution to conferencePaperpeer-review

Abstract

Layer guided surface aoustic wave devices fabricated on ST-cut quartz are presented, having an S1813 photoresist guiding layer constructed only over the transducers. Experimental data is shown comparing devices with complete and so-called dasiasectionalpsila guiding layers both possessing enhanced mass sensitivity over a bare surface skimming bulk wave device. Sensitivity to rigid mass and viscous loading is demonstrated using gold deposition and water-glycerol mixtures. Protein adsorption was also followed using the sectional guiding layer devices. Advantages of sectional wave-guided sensors having a free propagation path are discussed.
Original languageEnglish
DOIs
Publication statusPublished - 9 Sep 2008

Keywords

  • acoustic propagation
  • acoustic sensors
  • gold
  • polymers
  • proteins
  • resists
  • surface acoustic wave devices

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