Layer guided surface aoustic wave devices fabricated on ST-cut quartz are presented, having an S1813 photoresist guiding layer constructed only over the transducers. Experimental data is shown comparing devices with complete and so-called dasiasectionalpsila guiding layers both possessing enhanced mass sensitivity over a bare surface skimming bulk wave device. Sensitivity to rigid mass and viscous loading is demonstrated using gold deposition and water-glycerol mixtures. Protein adsorption was also followed using the sectional guiding layer devices. Advantages of sectional wave-guided sensors having a free propagation path are discussed.
|Publication status||Published - 9 Sep 2008|
- acoustic propagation
- acoustic sensors
- surface acoustic wave devices