Low temperature bonding techniques for MEMS applications

C. C. Dunare, J. T. M. Stevenson, A. M. Gundlach, A. J. Walton, W. Parkes

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	International Semiconductor Conference, CAS, 2001
Pages	4
Number of pages	1
Publication status	Published - 2001

Cite this

@inproceedings{cca630f76a654334898d0dd3fb6dac7d,

title = "Low temperature bonding techniques for MEMS applications",

author = "Dunare, {C. C.} and Stevenson, {J. T. M.} and Gundlach, {A. M.} and Walton, {A. J.} and W. Parkes",

year = "2001",

language = "Undefined/Unknown",

pages = "4",

booktitle = "International Semiconductor Conference, CAS, 2001",

}