| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | Proceedings of Fifth Electronics New Zealand Conference |
| Pages | 4 |
| Number of pages | 1 |
| Publication status | Published - 1998 |
Low temperature reactive ion etching of silicon for micromachining
H. Devereux, R. Cheung
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution