Original language | English |
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Pages (from-to) | 23522-23529 |
Number of pages | 8 |
Journal | Optics Express |
Volume | 17/26 |
DOIs | |
Publication status | Published - 8 Dec 2009 |
Mask-less ultraviolet photolithography based on CMOS-driven micro-pixel light emitting diodes
D. Elfström, B. Guilhabert, J. McKendry, S. Poland, Z. Gong, D. Massoubre, E. Richardson, G. Valentine, E. Gu, Robert Henderson, M. D. Dawson
Research output: Contribution to journal › Article › peer-review