Mass Transport in a Solid Electrolyte Film that can be used to Tune Microelectromechanical Resonators

C. L. Brown, S. Enderling, J. Hedley, M. J. Kozicki, M. Mitkova, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationTechnical Proceedings of the 2005 Nanotechnology Conference
Number of pages1
Publication statusPublished - 2005

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