Mechanical properties of a 3C-SiC layer between RT and 600 ºC

M. Pozzi, M. Hassan, A. J. Harris, J. S. Burdess, K. K. Lee, Rebecca Cheung, C. A. Zorman, M. Mehregany

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)3335-3342
Number of pages8
JournalJournal of Physics D: Applied Physics
Issue number40
Publication statusPublished - 2007

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