Micro-scale Sensors based in Silicon Carbide and Silicon

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	19-26
Number of pages	8
Journal	Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
Publication status	Published - 2008

Cite this

@article{f8017dd5e3ac403582bcaf989f6ee59a,

title = "Micro-scale Sensors based in Silicon Carbide and Silicon",

author = "Rebecca Cheung and P. Argyrakis",

year = "2008",

language = "Undefined/Unknown",

pages = "19--26",

journal = "Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science",

issn = "0954-4062",

publisher = "SAGE Publications Ltd",

}

TY - JOUR

T1 - Micro-scale Sensors based in Silicon Carbide and Silicon

AU - Cheung, Rebecca

AU - Argyrakis, P.

PY - 2008

Y1 - 2008

M3 - Article

SP - 19

EP - 26

JO - Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

JF - Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

SN - 0954-4062

ER -