Micro-scale Sensors based in Silicon Carbide and Silicon

Rebecca Cheung, P. Argyrakis

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)19-26
Number of pages8
JournalProceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
Publication statusPublished - 2008

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