Microelectromechanical systems for biomimetical applications

Rhonira Latif, Enrico Mastropaolo, Andrew Bunting, Rebecca Cheung, Thomas Koickal, Alister Hamilton, Michael Newton, Leslie Smith

Research output: Contribution to journalArticlepeer-review

Abstract / Description of output

An etch release process capable of releasing long resonant gate transistor bridges from a sacrificial layer has been studied as a step towards developing a system to mimic the cochlear mechanism inside the human ear. The developed etch release process involves the use of a gentle etch tool that is capable of a clean and damage-free etch release. The influence of temperature and oxygen/nitrogen gas flow rates on the undercut etch rates and the profiles of photoresist and polyimide sacrificial layers have been investigated. An array of aluminum bridges of length 0.278-1.618 mm, which cover the frequencies from 1 to 33.86 kHz, has been designed and released from a sacrificial layer. The resonating beams have been measured. (C) 2010 American Vacuum Society. [DOI:10.1116/1.3504892]

Original languageEnglish
Pages (from-to)C6N1-C6N6
Number of pages6
JournalJournal of Vacuum Science and Technology B
Issue number6
Publication statusPublished - Nov 2010


Dive into the research topics of 'Microelectromechanical systems for biomimetical applications'. Together they form a unique fingerprint.

Cite this