Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine

Anthony Buchoux, Prashant Agrawal, Gary G. Wells, Rodrigo Ledesma-Aguilar, Anthony J. Walton, Jonathan G. Terry, Glen Mchale, Khellil Sefiane, Adam A. Stokes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on the implementation of test structures to characterize the design of a microheater that facilitates localized heating to power a Leidenfrost micro-engines. The test structures are designed to characterize the effect on heat transfer of trenches etched into the silicon substrate. With no trench, the temperature difference is triangle T=11.9 oC. The temperature measured across the 412 μ m deep 'long' trench was 43.6 °C while it was 40.4 °C for the 'short' trench. The results show that increasing the depth of the trench increases the temperature difference across the trench (19.9circC increase for going from 73 μ m to 412 μ m, for the 'short' channel) while the length of the trench has a much less significant effect (3.2circC increase from 'short' to 'long' trench, for a depth of 412 μ m). The test structure measurements agreed well with simulation results confirming the validity of using computer aided design as an integral part in the development of microheater designs.
Original languageEnglish
Title of host publication2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings
Place of PublicationUnited States
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-6
Number of pages6
ISBN (Print)78-1-7281-4007-8
DOIs
Publication statusPublished - 4 Jun 2020
Event2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) - University of Edinburgh, Edinburgh, United Kingdom
Duration: 6 Apr 20209 Apr 2020

Publication series

NameIEEE International Conference on Microelectronic Test Structures
PublisherInstitute of Electrical and Electronics Engineers Inc.

Conference

Conference2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)
Abbreviated titleICMTS 2020
Country/TerritoryUnited Kingdom
CityEdinburgh
Period6/04/209/04/20

Keywords

  • deep etch
  • Leidenfrost
  • MEMS engine
  • microheater
  • thermal insulation

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