@inproceedings{8df6c2b7828b48b086b9440f1f6317ef,
title = "Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine",
abstract = "This paper reports on the implementation of test structures to characterize the design of a microheater that facilitates localized heating to power a Leidenfrost micro-engines. The test structures are designed to characterize the effect on heat transfer of trenches etched into the silicon substrate. With no trench, the temperature difference is triangle T=11.9 oC. The temperature measured across the 412 μ m deep 'long' trench was 43.6 °C while it was 40.4 °C for the 'short' trench. The results show that increasing the depth of the trench increases the temperature difference across the trench (19.9circC increase for going from 73 μ m to 412 μ m, for the 'short' channel) while the length of the trench has a much less significant effect (3.2circC increase from 'short' to 'long' trench, for a depth of 412 μ m). The test structure measurements agreed well with simulation results confirming the validity of using computer aided design as an integral part in the development of microheater designs.",
keywords = "deep etch, Leidenfrost, MEMS engine, microheater, thermal insulation",
author = "Anthony Buchoux and Prashant Agrawal and Wells, {Gary G.} and Rodrigo Ledesma-Aguilar and Walton, {Anthony J.} and Terry, {Jonathan G.} and Glen Mchale and Khellil Sefiane and Stokes, {Adam A.}",
year = "2020",
month = jun,
day = "4",
doi = "10.1109/ICMTS48187.2020.9107902",
language = "English",
isbn = "78-1-7281-4007-8",
series = "IEEE International Conference on Microelectronic Test Structures",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1--6",
booktitle = "2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings",
address = "United States",
note = "2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS), ICMTS 2020 ; Conference date: 06-04-2020 Through 09-04-2020",
}