Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices

G. Schiavone, S. Smith, J. Murray, J.G. Terry, M.P.Y. Desmulliez, A.J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationMicroelectronic Test Structures (ICMTS), 2013 IEEE International Conference on
Pages13-18
Number of pages6
DOIs
Publication statusPublished - 2013

Keywords

  • electroplating
  • magnetic materials
  • microswitches
  • nickel compounds
  • MEMS switching devices
  • NiFe
  • actuation response
  • electroplated cantilevers
  • freestanding structures
  • magnetic actuation
  • magnetically actuated MEMS switches
  • mnicromechanical test structures
  • test devices

Cite this