Mirror quality and efficiency improvements of reflective spatial light modulators by the use of dielectric coatings and chemical-mechanical polishing

A. O'Hara, J. R. Hannah, Ian Underwood, D. G. Vass, R. J. Holwill

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)5549-5556
Number of pages7
JournalApplied optics
Volume32
Publication statusPublished - 1993

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