Modification of He Implantation Induced Defects using Fluorine Co-implantation.

D. Alquier, G. Gaudin, M. F. Beaufort, S. E. Donnelly, Leslie Haworth, F. Cayrel

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	240-243
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	257
Publication status	Published - 2007

Cite this

@article{2cc7d2dd8af64815a7d4877226aec2d0,

title = "Modification of He Implantation Induced Defects using Fluorine Co-implantation.",

author = "D. Alquier and G. Gaudin and Beaufort, {M. F.} and Donnelly, {S. E.} and Leslie Haworth and F. Cayrel",

year = "2007",

language = "Undefined/Unknown",

volume = "257",

pages = "240--243",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

publisher = "Elsevier",

}

TY - JOUR

T1 - Modification of He Implantation Induced Defects using Fluorine Co-implantation.

AU - Alquier, D.

AU - Gaudin, G.

AU - Beaufort, M. F.

AU - Donnelly, S. E.

AU - Haworth, Leslie

AU - Cayrel, F.

PY - 2007

Y1 - 2007

M3 - Article

VL - 257

SP - 240

EP - 243

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

ER -