Original language | Undefined/Unknown |
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Title of host publication | Proceedings of 6th Electronics New Zealand Conference (ENZCon99) |
Pages | 6 |
Number of pages | 1 |
Publication status | Published - 1999 |
Nanolithography using reactive ion etched silicon nitride phase masks
H. Chen, R. J. Blaikie, R. Cheung, M. M. Alkaisi
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution