Original language | Undefined/Unknown |
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Title of host publication | Proceedings of Material Research Society |
Publication status | Published - 1991 |
Nanostructure Fabrication: Dry etching damage
G. F. Doughty, R. Cheung, M. A. Foad, M. Rahman, N. I. Cameron, N. P. Johnson, P. D. Wang, C. D. W. Wilkinson
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution