Nanostructure Fabrication: Dry etching damage

G. F. Doughty, R. Cheung, M. A. Foad, M. Rahman, N. I. Cameron, N. P. Johnson, P. D. Wang, C. D. W. Wilkinson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationProceedings of Material Research Society
Publication statusPublished - 1991

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