Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification

Ke Han, Xubing Guo, Stewart Smith, Zhongliang Deng, Wuyu Li

Research output: Contribution to journalArticlepeer-review

Abstract

This paper proposes a novel high-capacitance-ratio radio frequency micro-electromechanical systems (RF MEMS) switch. The proposed RF MEMS mainly consists of serpentine flexure MEMS metallic beam, comprised of coplanar waveguide (CPW) transmission line, dielectric and metal-insulator-metal (MIM) floating metallic membrane. Comparing the proposed high-capacitance-ratio MEMS switch with the ones in available literature, an acceptable insertion loss insulation, acceptable response time and high capacitance ratio (383.8) are achieved.
Original languageEnglish
Article number390
JournalMicromachines
Volume9
Issue number8
DOIs
Publication statusPublished - 6 Aug 2018

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