Null holographic test structures for the measurement of overlay and its statistical variation

S A AbuGhazaleh, P Christie, V Agrawal, J T M Stevenson, A J Walton, A M Gundlach, S Smith

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)173-180
Number of pages8
JournalIEEE Transactions on Semiconductor Manufacturing
Volume13
Issue number2
Publication statusPublished - 2000

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