Optimization of the visibility of graphene on poly-Si film by thin-film optics engineering

T. Chen, E. Mastropaolo, A. Bunting, T. Stevenson, R. Cheung

Research output: Contribution to journalArticlepeer-review


A multilayer optical system containing poly-Si film, SiO film, and Si substrate (poly-Si substrate) has been designed to enhance the visibility of graphene in contact with poly-Si. Film thicknesses of poly-Si and SiO have been optimized by parametric study of the integral contrast of single layer graphene using transfer matrix theory. The multilayer poly-Si substrate and the most commonly used 285 nm SiO/Si substrate (SiO substrate) have been fabricated. Graphene grown by chemical vapor deposition on Ni catalyst has been transferred to the substrates and the visibility of the graphene on the different substrates has been compared. The samples have been characterized by optical microscope, illuminated with light from halogen lamp, and/or filtered with a 600 nm narrow band optical filter. The contrast of graphene on poly-Si substrate has been increased to near 8.7 under 600 nm narrow band illumination from nearly invisible under ordinary illumination, while the contrast of graphene on SiO remains almost the same. Raman spectroscopy has been used to verify the presence of the single layer graphene on the poly-Si substrate.
Original languageEnglish
Article number06FJ01
Number of pages6
JournalJournal of Vacuum Science and Technology B
Issue number6
Publication statusPublished - Nov 2012


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