Oxygen plasma induced hydrophilicity of Parylene-C thin films

Tatiana Trantidou*, Themistoklis Prodromakis, Chris Toumazou

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract / Description of output

This paper investigates the surface modification of Parylene-C thin films under various oxygen plasma treatment conditions, such as power intensity (50:400 W) and exposure time (1:20 min). The extent of hydrophilicity was investigated through contact angle measurements, and correlations between treatment parameters, film thickness, restoration of hydrophobicity and etching rates were experimentally established. We also demonstrate the selective modification of Parylene-C films, facilitating distinct hydrophilic and hydrophobic areas with μm-resolution that can be exploited in self-alignment applications.

Original languageEnglish
Pages (from-to)43-51
Number of pages9
JournalApplied Surface Science
Publication statusPublished - 15 Nov 2012

Keywords / Materials (for Non-textual outputs)

  • Hydrophilic
  • Hydrophobic
  • Hydrophobicity restoration
  • Oxygen plasma
  • Parylene-C
  • Selective patterning
  • Surface modification


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