Oxygen plasma induced hydrophilicity of Parylene-C thin films

Tatiana Trantidou; Themistoklis Prodromakis; Chris Toumazou

doi:10.1016/j.apsusc.2012.06.112

Oxygen plasma induced hydrophilicity of Parylene-C thin films

Tatiana Trantidou^*, Themistoklis Prodromakis, Chris Toumazou

^*Corresponding author for this work

School of Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This paper investigates the surface modification of Parylene-C thin films under various oxygen plasma treatment conditions, such as power intensity (50:400 W) and exposure time (1:20 min). The extent of hydrophilicity was investigated through contact angle measurements, and correlations between treatment parameters, film thickness, restoration of hydrophobicity and etching rates were experimentally established. We also demonstrate the selective modification of Parylene-C films, facilitating distinct hydrophilic and hydrophobic areas with μm-resolution that can be exploited in self-alignment applications.

Original language	English
Pages (from-to)	43-51
Number of pages	9
Journal	Applied Surface Science
Volume	261
DOIs	https://doi.org/10.1016/j.apsusc.2012.06.112
Publication status	Published - 15 Nov 2012

Keywords / Materials (for Non-textual outputs)

Hydrophilic
Hydrophobic
Hydrophobicity restoration
Oxygen plasma
Parylene-C
Selective patterning
Surface modification

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10.1016/j.apsusc.2012.06.112

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title = "Oxygen plasma induced hydrophilicity of Parylene-C thin films",

abstract = "This paper investigates the surface modification of Parylene-C thin films under various oxygen plasma treatment conditions, such as power intensity (50:400 W) and exposure time (1:20 min). The extent of hydrophilicity was investigated through contact angle measurements, and correlations between treatment parameters, film thickness, restoration of hydrophobicity and etching rates were experimentally established. We also demonstrate the selective modification of Parylene-C films, facilitating distinct hydrophilic and hydrophobic areas with μm-resolution that can be exploited in self-alignment applications.",

keywords = "Hydrophilic, Hydrophobic, Hydrophobicity restoration, Oxygen plasma, Parylene-C, Selective patterning, Surface modification",

author = "Tatiana Trantidou and Themistoklis Prodromakis and Chris Toumazou",

year = "2012",

month = nov,

day = "15",

doi = "10.1016/j.apsusc.2012.06.112",

language = "English",

volume = "261",

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journal = "Applied Surface Science",

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TY - JOUR

T1 - Oxygen plasma induced hydrophilicity of Parylene-C thin films

AU - Trantidou, Tatiana

AU - Prodromakis, Themistoklis

AU - Toumazou, Chris

PY - 2012/11/15

Y1 - 2012/11/15

N2 - This paper investigates the surface modification of Parylene-C thin films under various oxygen plasma treatment conditions, such as power intensity (50:400 W) and exposure time (1:20 min). The extent of hydrophilicity was investigated through contact angle measurements, and correlations between treatment parameters, film thickness, restoration of hydrophobicity and etching rates were experimentally established. We also demonstrate the selective modification of Parylene-C films, facilitating distinct hydrophilic and hydrophobic areas with μm-resolution that can be exploited in self-alignment applications.

AB - This paper investigates the surface modification of Parylene-C thin films under various oxygen plasma treatment conditions, such as power intensity (50:400 W) and exposure time (1:20 min). The extent of hydrophilicity was investigated through contact angle measurements, and correlations between treatment parameters, film thickness, restoration of hydrophobicity and etching rates were experimentally established. We also demonstrate the selective modification of Parylene-C films, facilitating distinct hydrophilic and hydrophobic areas with μm-resolution that can be exploited in self-alignment applications.

KW - Hydrophilic

KW - Hydrophobic

KW - Hydrophobicity restoration

KW - Oxygen plasma

KW - Parylene-C

KW - Selective patterning

KW - Surface modification

UR - http://www.scopus.com/inward/record.url?scp=84867742101&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2012.06.112

DO - 10.1016/j.apsusc.2012.06.112

M3 - Article

AN - SCOPUS:84867742101

SN - 0169-4332

VL - 261

SP - 43

EP - 51

JO - Applied Surface Science

JF - Applied Surface Science

ER -

Oxygen plasma induced hydrophilicity of Parylene-C thin films

Abstract

Keywords / Materials (for Non-textual outputs)

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