PASS - A Chalcogenide-based lithography scheme for IC fabrication

M. N. Kozicki, S. W. Hsia, A. E. Owen, Peter Ewen

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1341-1344
Number of pages	4
Journal	Journal of Non-Crystalline Solids
Volume	138
Publication status	Published - 1991

Cite this

@article{82e51b5f9e8b48488c4e3c5aeb88e1d5,

title = "PASS - A Chalcogenide-based lithography scheme for IC fabrication",

author = "Kozicki, {M. N.} and Hsia, {S. W.} and Owen, {A. E.} and Peter Ewen",

year = "1991",

language = "Undefined/Unknown",

volume = "138",

pages = "1341--1344",

journal = "Journal of Non-Crystalline Solids",

publisher = "Elsevier",

}