Passivation of donors in electron-beam lithographically defined nanostructures after methane/hydrogen reactive ion etching

Rebecca Cheung, S. Thoms, I. McIntyre, C. D. W. Wilkinson, S. P. Beaumont

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)1911-1914
Number of pages4
JournalJournal of Vacuum Science and Technology B
Publication statusPublished - 1988

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