Piezoresistive Membrane Deflection Test Structure for the Evaluation of Hermeticity in Low Cavity Volume MEMS and Microelectronic Packages

S. Costello, M. P. Y. Desmulliez, S. McCracken, C. Lowrie, S. Cargill, A. J. Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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