Planarisation of spatial light modulator silicon backplanes using chemical-mechanical polishing

A. O'Hara, I. Underwood, D. G. Vass

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationIEE Colloquium Digest on Micro-engineering and Optics
Publication statusPublished - 1994

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