Original language | Undefined/Unknown |
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Title of host publication | IEE Colloquium Digest on Micro-engineering and Optics |
Publication status | Published - 1994 |
Planarisation of spatial light modulator silicon backplanes using chemical-mechanical polishing
A. O'Hara, I. Underwood, D. G. Vass
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution