| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | IEE Colloquium Digest on Micro-engineering and Optics |
| Publication status | Published - 1994 |
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Planarisation of spatial light modulator silicon backplanes using chemical-mechanical polishing
- A. O'Hara
- , I. Underwood
- , D. G. Vass
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution