Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators

A. O'Hara, I. D. Rankin, M. L. Begbie, D. G. Vass, D. C. Burns, I. Underwood, J. T. M. Stevenson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationProceedings SPIE on Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
Pages11
Number of pages1
Publication statusPublished - 1995

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