Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators

A. O'Hara; I. D. Rankin; M. L. Begbie; D. G. Vass; D. C. Burns; I. Underwood; J. T. M. Stevenson

Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators

A. O'Hara
, I. D. Rankin
, M. L. Begbie
, D. G. Vass
, D. C. Burns
, I. Underwood
, J. T. M. Stevenson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Proceedings SPIE on Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
Pages	11
Number of pages	1
Publication status	Published - 1995

Cite this

O'Hara, A., Rankin, I. D., Begbie, M. L., Vass, D. G., Burns, D. C., Underwood, I., & Stevenson, J. T. M. (1995). Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators. In Proceedings SPIE on Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications (pp. 11)

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title = "Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators",

author = "A. O'Hara and Rankin, \{I. D.\} and Begbie, \{M. L.\} and Vass, \{D. G.\} and Burns, \{D. C.\} and I. Underwood and Stevenson, \{J. T. M.\}",

year = "1995",

language = "Undefined/Unknown",

pages = "11",

booktitle = "Proceedings SPIE on Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications",

}

O'Hara, A, Rankin, ID, Begbie, ML, Vass, DG, Burns, DC, Underwood, I & Stevenson, JTM 1995, Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators. in Proceedings SPIE on Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications. pp. 11.

Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators. / O'Hara, A.; Rankin, I. D.; Begbie, M. L. et al.
Proceedings SPIE on Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications. 1995. p. 11.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators

AU - O'Hara, A.

AU - Rankin, I. D.

AU - Begbie, M. L.

AU - Vass, D. G.

AU - Burns, D. C.

AU - Underwood, I.

AU - Stevenson, J. T. M.

PY - 1995

Y1 - 1995

M3 - Conference contribution

SP - 11

BT - Proceedings SPIE on Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications

ER -

O'Hara A, Rankin ID, Begbie ML, Vass DG, Burns DC, Underwood I et al. Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators. In Proceedings SPIE on Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications. 1995. p. 11