Protection of DRAM spatial light modulators from incident light using a multilevel metallization procedure

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 25th European Solid State Devices Research Conference
Pages	4
Number of pages	1
Publication status	Published - 1995

Cite this

@inproceedings{5bf3917f59f8424a9ab181fc0c0f301d,

title = "Protection of DRAM spatial light modulators from incident light using a multilevel metallization procedure",

author = "A. O'Hara and M. Begbie and Rankin, \{I. D.\} and Burns, \{D. C.\} and J. Gourlay and I. Underwood and Vass, \{D. G.\}",

year = "1995",

language = "Undefined/Unknown",

pages = "4",

booktitle = "Proceedings of the 25th European Solid State Devices Research Conference",

}

TY - GEN

T1 - Protection of DRAM spatial light modulators from incident light using a multilevel metallization procedure

AU - O'Hara, A.

AU - Begbie, M.

AU - Rankin, I. D.

AU - Burns, D. C.

AU - Gourlay, J.

AU - Underwood, I.

AU - Vass, D. G.

PY - 1995

Y1 - 1995

M3 - Conference contribution

SP - 4

BT - Proceedings of the 25th European Solid State Devices Research Conference

ER -