| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | Computer Aided Production Engineering (CAPE) 2007 |
| Pages | 5 |
| Number of pages | 1 |
| Publication status | Published - 2007 |
Radio Frequency Electrodischarge Machining of Silicon Wafers
D. M. Macmillan, B. W. Flynn, J. McGeough, A. Okada
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution