Raman scattering investigations of the damage caused by reactive ion etching of GaAs

M. Watt, C. M. Sotomayor-Torres, Rebecca Cheung, C. D. W. Wilkinson, H. E. G. Arnot, S. P. Beaumont

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)243-244
Number of pages2
JournalSuperlattices and Microstructures
Volume4
Publication statusPublished - 1988

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