Reactive ion etching of GaN and etch-induced surface damage

R. Cheung, R. J. Reeves, S. Withanage, E. van der Drift, M. Kamp

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationpresented in 43rd International conference on Electron, Ion and Photon Beam Technology and Nanofabrication
Publication statusPublished - 1999

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