Recent advances in the design and fabrication of spatial light modulators using liquid crystal on silicon

D. C. Burns; I. Underwood; A. O'Hara; J. Gourlay; D. G. Vass; I. D. Rankin

Recent advances in the design and fabrication of spatial light modulators using liquid crystal on silicon

D. C. Burns
, I. Underwood
, A. O'Hara
, J. Gourlay
, D. G. Vass
, I. D. Rankin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present preliminary results obtained from two high performance electronically addressed spatial light modulators (SLMs). One has been designed for maximum resolution, the other for improved pixel functionality and performance. We also report on the first "planarized" silicon backplanes to be filled with Ferroelectric Liquid Crystal (FLC).

Original language	English
Title of host publication	Digest of IEEE/LEOS Summer Topical Meeting on Smart Pixels
Subtitle of host publication	Addendum of Postdeadline papers
Publisher	Institute of Electrical and Electronics Engineers
Number of pages	2
Publication status	Published - 1994

Cite this

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title = "Recent advances in the design and fabrication of spatial light modulators using liquid crystal on silicon",

abstract = "We present preliminary results obtained from two high performance electronically addressed spatial light modulators (SLMs). One has been designed for maximum resolution, the other for improved pixel functionality and performance. We also report on the first {"}planarized{"} silicon backplanes to be filled with Ferroelectric Liquid Crystal (FLC).",

author = "Burns, \{D. C.\} and I. Underwood and A. O'Hara and J. Gourlay and Vass, \{D. G.\} and Rankin, \{I. D.\}",

year = "1994",

language = "English",

booktitle = "Digest of IEEE/LEOS Summer Topical Meeting on Smart Pixels",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

}

Recent advances in the design and fabrication of spatial light modulators using liquid crystal on silicon. / Burns, D. C.; Underwood, I.; O'Hara, A. et al.
Digest of IEEE/LEOS Summer Topical Meeting on Smart Pixels : Addendum of Postdeadline papers. Institute of Electrical and Electronics Engineers, 1994.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Recent advances in the design and fabrication of spatial light modulators using liquid crystal on silicon

AU - Burns, D. C.

AU - Underwood, I.

AU - O'Hara, A.

AU - Gourlay, J.

AU - Vass, D. G.

AU - Rankin, I. D.

PY - 1994

Y1 - 1994

N2 - We present preliminary results obtained from two high performance electronically addressed spatial light modulators (SLMs). One has been designed for maximum resolution, the other for improved pixel functionality and performance. We also report on the first "planarized" silicon backplanes to be filled with Ferroelectric Liquid Crystal (FLC).

AB - We present preliminary results obtained from two high performance electronically addressed spatial light modulators (SLMs). One has been designed for maximum resolution, the other for improved pixel functionality and performance. We also report on the first "planarized" silicon backplanes to be filled with Ferroelectric Liquid Crystal (FLC).

M3 - Conference contribution

BT - Digest of IEEE/LEOS Summer Topical Meeting on Smart Pixels

PB - Institute of Electrical and Electronics Engineers

ER -

Recent advances in the design and fabrication of spatial light modulators using liquid crystal on silicon

Abstract

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