| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | SPIE Symposium on Microelectronic Manufacture |
| Pages | 12 |
| Number of pages | 1 |
| Publication status | Published - 1996 |
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Sampling based yield prediction for ULSI
- G. A. Allan
- , A. J. Walton
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution