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Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
Christiaan Bekker, Muhammad Junaid Arshad, Pasquale Cilibrizzi, Charalampos Nikolatos, Peter Lomax, Graham Wood, Rebecca Cheung, Wolfgang Knolle, Neil Ross, Brian D. Gerardot, Cristian Bonato
Research output: Contribution to journal › Letter › peer-review