SiC cantilever resonators with electrothermal actuation

L. Jiang, Rebecca Cheung, J. Hedley, M. Hassan, A. J. Harris, J. S. Burdess, C. A. Zorman, M. Mehregany

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)376-386
Number of pages11
JournalSensors and Actuators A: Physical
Volume128
Publication statusPublished - 2006

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