SiC cantilever resonators with electrothermal actuation

L. Jiang, Rebecca Cheung, J. Hedley, M. Hassan, A. J. Harris, J. S. Burdess, C. A. Zorman, M. Mehregany

School of Engineering

Research output: Contribution to journal › Article › peer-review

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Finished
Integration of Microelectromechanical Systems (MEMS) with Electronics in Silicon Carbide for harsh environment
Cheung, R. (Principal Investigator)
EPSRC
1/12/04 → 31/05/08
Project: Research