The design, fabrication and characterisation of flexural-mode 3C-SiC resonators are presented. Single-clamped, double-clamped beams and circular membranes, with aluminium and platinum electrodes patterned on top, have been implemented. The structures' resonant frequency has been investigated optically when the devices are actuated mechanically and electro-thermally. Electro-thermal mixing of two input electrical signals with two different frequencies has been demonstrated. The temperature stability of the 3C-SiC resonators has been characterised.
|Title of host publication||Materials Science Forum|
|Number of pages||8|
|Publication status||Published - 1 Jan 2012|