Study of 3C-SiC mechanical resonators, filters and mixers

E. Mastropaolo, R. Cheung

Research output: Chapter in Book/Report/Conference proceedingOther chapter contribution

Abstract

The design, fabrication and characterisation of flexural-mode 3C-SiC resonators are presented. Single-clamped, double-clamped beams and circular membranes, with aluminium and platinum electrodes patterned on top, have been implemented. The structures' resonant frequency has been investigated optically when the devices are actuated mechanically and electro-thermally. Electro-thermal mixing of two input electrical signals with two different frequencies has been demonstrated. The temperature stability of the 3C-SiC resonators has been characterised.
Original languageEnglish
Title of host publicationMaterials Science Forum
Pages43-50
Number of pages8
Volume711
DOIs
Publication statusPublished - 1 Jan 2012

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