TY - CHAP
T1 - Study of 3C-SiC mechanical resonators, filters and mixers
AU - Mastropaolo, E.
AU - Cheung, R.
PY - 2012/1/1
Y1 - 2012/1/1
N2 - The design, fabrication and characterisation of flexural-mode 3C-SiC resonators are presented. Single-clamped, double-clamped beams and circular membranes, with aluminium and platinum electrodes patterned on top, have been implemented. The structures' resonant frequency has been investigated optically when the devices are actuated mechanically and electro-thermally. Electro-thermal mixing of two input electrical signals with two different frequencies has been demonstrated. The temperature stability of the 3C-SiC resonators has been characterised.
AB - The design, fabrication and characterisation of flexural-mode 3C-SiC resonators are presented. Single-clamped, double-clamped beams and circular membranes, with aluminium and platinum electrodes patterned on top, have been implemented. The structures' resonant frequency has been investigated optically when the devices are actuated mechanically and electro-thermally. Electro-thermal mixing of two input electrical signals with two different frequencies has been demonstrated. The temperature stability of the 3C-SiC resonators has been characterised.
UR - http://release-www.scopus.com//inward/record.url?partnerID=yv4JPVwI&eid=2-s2.0-84856951253&md5=26309ba373f9b6facdaf1cf15fc31754
U2 - 10.4028/www.scientific.net/MSF.711.43
DO - 10.4028/www.scientific.net/MSF.711.43
M3 - Other chapter contribution
AN - SCOPUS:84856951253
VL - 711
SP - 43
EP - 50
BT - Materials Science Forum
ER -