Original language | Undefined/Unknown |
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Pages (from-to) | 369-375 |
Number of pages | 7 |
Journal | Microelectronic Engineering |
Volume | 67-68 |
Publication status | Published - 2003 |
Surface characterisation of inductively coupled plasma etched SiC in SF6/O2
L. Jiang, N. O. V. Plank, Rebecca Cheung
Research output: Contribution to journal › Article › peer-review