Surface characterization of inductively coupled plasma etched SiC in SF6/O-2

L D Jiang, N O V Plank, R Cheung, R Brown, A Mount

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Surface characterization of inductively coupled plasma etched SiC in SF6/O-2'. Together they form a unique fingerprint.

Engineering

Material Science

Physics