Suspended Greek Cross Test Structures for Measuring the Sheet Resistance of Non-Standard Cleanroom Materials

S. Enderling, M. H. Dicks, Stewart Smith, J. T. M. Stevenson, A. J. Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	IEEE International Conference on Microelectronic Test Structures
Pages	4
Number of pages	1
Publication status	Published - 2005

Cite this

@inproceedings{9d310bc00c9344bc8fa01ed47ef4c904,

title = "Suspended Greek Cross Test Structures for Measuring the Sheet Resistance of Non-Standard Cleanroom Materials",

author = "S. Enderling and Dicks, {M. H.} and Stewart Smith and Stevenson, {J. T. M.} and Walton, {A. J.}",

year = "2005",

language = "Undefined/Unknown",

pages = "4",

booktitle = "IEEE International Conference on Microelectronic Test Structures",

}