Suspended Greek Cross Test Structures for Measuring the Sheet Resistance of Non-Standard Cleanroom Materials

S. Enderling, M. H. Dicks, Stewart Smith, J. T. M. Stevenson, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationIEEE International Conference on Microelectronic Test Structures
Number of pages1
Publication statusPublished - 2005

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