| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | Digest of the LEOS Summer Topical Meetings - Optical MEMS |
| Pages | 2 |
| Number of pages | 1 |
| Publication status | Published - 1998 |
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Technique to improve flatness of MEM backplanes
- K. Seunarine
- , I. Underwood
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution