Test structure and measurement system for characterising the electrochemical performance of nanoelectrode structures

Ilka Schmueser, Ewen Blair, Ziya Isiksacan, Yifan Liang, Damion Corrigan, Adam Stokes, Jonathan Terry, Andrew R Mount, Anthony Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a complete test structure and characterisation system for the evaluation of nanoelectrode technology. It integrates microfabricated nanoelectrodes for electrochemical measurements, 3D printing and surface tensionconfined microfluidics. This system exploits the inherent analytical advantages of nanoelectrodes that enables their operation with small volume samples, which has potential applications for onwafer measurements.
Original languageEnglish
Title of host publication2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)
PublisherInstitute of Electrical and Electronics Engineers
ISBN (Print)978-1-7281-4007-8
DOIs
Publication statusPublished - 4 Jun 2020
Event2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) - University of Edinburgh, Edinburgh, United Kingdom
Duration: 6 Apr 20209 Apr 2020

Conference

Conference2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)
Abbreviated titleICMTS 2020
Country/TerritoryUnited Kingdom
CityEdinburgh
Period6/04/209/04/20

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