Test structure for characterising low voltage coplanar EWOD system

Y. Li, L. Haworth, W. Parkes, A. Walton, M. Yoshio, M. Kubota

Research output: Chapter in Book/Report/Conference proceedingOther chapter contribution

Abstract

This paper presents test structures designed for studying the relationship between the operation voltage and the configuration of electrode area for coplanar EWOD (ElectroWetting On Dielectrics) devices. Robust anodic Ta O dielectric and thin aFP (amorphous Fluoropolymer) have been used to fabricate the structures. Test structures have been used to characterise the significant contact angle change on asymmetric configurations, 114° to 81° on CYTOP (amorphous fluoropolymer from Asahi Glass Co. Ltd.) with an applied voltage of less than 20V. This demonstrates that by modifying the design, the operating voltage can be reduced by a factor of two, compared to the existing symmetric coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15V.
Original languageEnglish
Title of host publicationIEEE International Conference on Microelectronic Test Structures
Pages80-85
Number of pages6
DOIs
Publication statusPublished - 1 Jan 2008

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