Test Structure for Characterizing Low Voltage Coplanar EWOD System

Yifan Li; Yoshio Mita; Les I. Haworth; William Parkes; Masanori Kubota; Anthony J. Walton

doi:10.1109/TSM.2008.2010737

Test Structure for Characterizing Low Voltage Coplanar EWOD System

Yifan Li, Yoshio Mita, Les I. Haworth, William Parkes, Masanori Kubota, Anthony J. Walton

School of Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This paper presents test structures designed for studying the relationship between the operating voltage and different electrode configurations and areas for coplanar electrowetting on dielectrics (EWOD) devices. New test structures have been designed and fabricated using anodic Ta2O5 dielectric and thin aFP (amorphous Fluoropolymer CYTOP from Asahi Glass Co., Ltd.). These test structures have been used to characterize the contact angle change, which is between 114 degrees and 81 degrees with an applied voltage of less than 20 V. This demonstrates that by modifying the coplanar architecture, the operating voltage can be reduced by a factor of two, compared to previously reported coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15 V.

Original language	English
Pages (from-to)	88-95
Number of pages	8
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	22
Issue number	1
DOIs	https://doi.org/10.1109/TSM.2008.2010737
Publication status	Published - Feb 2009

Keywords / Materials (for Non-textual outputs)

Coplanar EWOD
Ta205
electrowetting-on-dielectric (EWOD)
lab-on-a-chip (LOC)
low voltage

Access to Document

10.1109/TSM.2008.2010737

http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=4773507

Cite this

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title = "Test Structure for Characterizing Low Voltage Coplanar EWOD System",

abstract = "This paper presents test structures designed for studying the relationship between the operating voltage and different electrode configurations and areas for coplanar electrowetting on dielectrics (EWOD) devices. New test structures have been designed and fabricated using anodic Ta2O5 dielectric and thin aFP (amorphous Fluoropolymer CYTOP from Asahi Glass Co., Ltd.). These test structures have been used to characterize the contact angle change, which is between 114 degrees and 81 degrees with an applied voltage of less than 20 V. This demonstrates that by modifying the coplanar architecture, the operating voltage can be reduced by a factor of two, compared to previously reported coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15 V.",

keywords = "Coplanar EWOD, Ta205, electrowetting-on-dielectric (EWOD), lab-on-a-chip (LOC), low voltage ",

author = "Yifan Li and Yoshio Mita and Haworth, {Les I.} and William Parkes and Masanori Kubota and Walton, {Anthony J.}",

year = "2009",

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doi = "10.1109/TSM.2008.2010737",

language = "English",

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pages = "88--95",

journal = "IEEE Transactions on Semiconductor Manufacturing",

issn = "0894-6507",

publisher = "Institute of Electrical and Electronics Engineers",

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T1 - Test Structure for Characterizing Low Voltage Coplanar EWOD System

AU - Li, Yifan

AU - Mita, Yoshio

AU - Haworth, Les I.

AU - Parkes, William

AU - Kubota, Masanori

AU - Walton, Anthony J.

PY - 2009/2

Y1 - 2009/2

N2 - This paper presents test structures designed for studying the relationship between the operating voltage and different electrode configurations and areas for coplanar electrowetting on dielectrics (EWOD) devices. New test structures have been designed and fabricated using anodic Ta2O5 dielectric and thin aFP (amorphous Fluoropolymer CYTOP from Asahi Glass Co., Ltd.). These test structures have been used to characterize the contact angle change, which is between 114 degrees and 81 degrees with an applied voltage of less than 20 V. This demonstrates that by modifying the coplanar architecture, the operating voltage can be reduced by a factor of two, compared to previously reported coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15 V.

AB - This paper presents test structures designed for studying the relationship between the operating voltage and different electrode configurations and areas for coplanar electrowetting on dielectrics (EWOD) devices. New test structures have been designed and fabricated using anodic Ta2O5 dielectric and thin aFP (amorphous Fluoropolymer CYTOP from Asahi Glass Co., Ltd.). These test structures have been used to characterize the contact angle change, which is between 114 degrees and 81 degrees with an applied voltage of less than 20 V. This demonstrates that by modifying the coplanar architecture, the operating voltage can be reduced by a factor of two, compared to previously reported coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15 V.

KW - Coplanar EWOD

KW - Ta205

KW - electrowetting-on-dielectric (EWOD)

KW - lab-on-a-chip (LOC)

KW - low voltage

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DO - 10.1109/TSM.2008.2010737

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EP - 95

JO - IEEE Transactions on Semiconductor Manufacturing

JF - IEEE Transactions on Semiconductor Manufacturing

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Test Structure for Characterizing Low Voltage Coplanar EWOD System

Abstract

Keywords / Materials (for Non-textual outputs)

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Test Structure for Characterizing Low Voltage Coplanar EWOD System

Abstract

Keywords / Materials (for Non-textual outputs)

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RASOR-Radical Solutions for Researching the Proteome: Interdisciplinary Research Collaboration in proteomic technologies

Platform Grant to Support the Development of Micro/Nano Technology Across a range of Disciplines

Cite this