Test structures and a measurement system for characterising the lifetime of EWOD devices

D. Gruber, Y. Li, S. Smith, A. Tiwari, F. Deng, Adam Stokes, Jonathan Terry, Andrew Bunting, Colin Mackay, P. Langridge-Smith, Anthony Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.

Original languageEnglish
Title of host publication2011 IEEE International Conference on Microelectronic Test Structures (ICMTS)
Place of PublicationNEW YORK
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages80-84
Number of pages5
ISBN (Print)978-1-4244-8527-7
DOIs
Publication statusPublished - Apr 2011
Event24th IEEE International Conference on Microelectronic Test Structures (ICMTS) - Amsterdam
Duration: 4 Apr 20117 Apr 2011

Conference

Conference24th IEEE International Conference on Microelectronic Test Structures (ICMTS)
CityAmsterdam
Period4/04/117/04/11

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