Test structures and a measurement system for characterising the lifetime of EWOD devices

D. Gruber; Y. Li; S. Smith; A. Tiwari; F. Deng; Adam Stokes; Jonathan Terry; Andrew Bunting; Colin Mackay; P. Langridge-Smith; Anthony Walton

doi:10.1109/ICMTS.2011.5976864

Test structures and a measurement system for characterising the lifetime of EWOD devices

D. Gruber, Y. Li, S. Smith, A. Tiwari, F. Deng, Adam Stokes, Jonathan Terry, Andrew Bunting, Colin Mackay, P. Langridge-Smith, Anthony Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.

Original language	English
Title of host publication	2011 IEEE International Conference on Microelectronic Test Structures (ICMTS)
Place of Publication	NEW YORK
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	80-84
Number of pages	5
ISBN (Print)	978-1-4244-8527-7
DOIs	https://doi.org/10.1109/ICMTS.2011.5976864
Publication status	Published - Apr 2011
Event	24th IEEE International Conference on Microelectronic Test Structures (ICMTS) - Amsterdam Duration: 4 Apr 2011 → 7 Apr 2011

Conference

Conference	24th IEEE International Conference on Microelectronic Test Structures (ICMTS)
City	Amsterdam
Period	4/04/11 → 7/04/11

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10.1109/ICMTS.2011.5976864

Cite this

Gruber, D., Li, Y., Smith, S., Tiwari, A., Deng, F., Stokes, A., Terry, J., Bunting, A., Mackay, C., Langridge-Smith, P., & Walton, A. (2011). Test structures and a measurement system for characterising the lifetime of EWOD devices. In 2011 IEEE International Conference on Microelectronic Test Structures (ICMTS) (pp. 80-84). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/ICMTS.2011.5976864

Gruber, D. ; Li, Y. ; Smith, S. ; Tiwari, A. ; Deng, F. ; Stokes, Adam ; Terry, Jonathan ; Bunting, Andrew ; Mackay, Colin ; Langridge-Smith, P. ; Walton, Anthony. / Test structures and a measurement system for characterising the lifetime of EWOD devices. 2011 IEEE International Conference on Microelectronic Test Structures (ICMTS). NEW YORK : Institute of Electrical and Electronics Engineers (IEEE), 2011. pp. 80-84

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title = "Test structures and a measurement system for characterising the lifetime of EWOD devices",

abstract = "This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.",

author = "D. Gruber and Y. Li and S. Smith and A. Tiwari and F. Deng and Adam Stokes and Jonathan Terry and Andrew Bunting and Colin Mackay and P. Langridge-Smith and Anthony Walton",

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doi = "10.1109/ICMTS.2011.5976864",

language = "English",

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booktitle = "2011 IEEE International Conference on Microelectronic Test Structures (ICMTS)",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

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note = "24th IEEE International Conference on Microelectronic Test Structures (ICMTS) ; Conference date: 04-04-2011 Through 07-04-2011",

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Gruber, D, Li, Y, Smith, S, Tiwari, A, Deng, F, Stokes, A , Terry, J, Bunting, A, Mackay, C , Langridge-Smith, P & Walton, A 2011, Test structures and a measurement system for characterising the lifetime of EWOD devices. in 2011 IEEE International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers (IEEE), NEW YORK, pp. 80-84, 24th IEEE International Conference on Microelectronic Test Structures (ICMTS), Amsterdam, 4/04/11. https://doi.org/10.1109/ICMTS.2011.5976864

Test structures and a measurement system for characterising the lifetime of EWOD devices. / Gruber, D.; Li, Y.; Smith, S.; Tiwari, A.; Deng, F.; Stokes, Adam ; Terry, Jonathan; Bunting, Andrew; Mackay, Colin ; Langridge-Smith, P.; Walton, Anthony.

2011 IEEE International Conference on Microelectronic Test Structures (ICMTS). NEW YORK : Institute of Electrical and Electronics Engineers (IEEE), 2011. p. 80-84.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.

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BT - 2011 IEEE International Conference on Microelectronic Test Structures (ICMTS)

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Test structures and a measurement system for characterising the lifetime of EWOD devices

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