Test Structures for Characterising the Fabrication of Miniature Reference Electrodes

Camelia Dunare; Shan Zhang; Jamie Marland; Andreas Tsiamis; Paul Sullivan; Ian Underwood; Jonathan G. Terry; Anthony J. Walton; Stewart Smith

doi:10.1109/ICMTS50340.2022.9898104

Test Structures for Characterising the Fabrication of Miniature Reference Electrodes

Camelia Dunare, Shan Zhang, Jamie Marland, Andreas Tsiamis, Paul Sullivan, Ian Underwood, Jonathan G. Terry, Anthony J. Walton, Stewart Smith

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract / Description of output

Robust and reliable micro-scale integrated electro- chemical sensors need a reference electrode that can provide a stable electrochemical potential. This can be achieved using a silver/silver chloride (Ag/AgCl) electrode, produced by the chemical chlorination of a thin patterned silver layer. Well understood and controlled processes are required to produce the Ag/AgCl electrode. This paper shows how previously reported test structures have been used to characterise and inform the fabrica- tion procedure. Wafer mapping of these structures was carried out using a Python controlled measurement system, consisting of a semi-automatic prober connected to an HP4062UX based analyser. The measurements were analysed to determine whether the chlorination process was affected by the test structure geometry. This was found to have no clear effect on chlorination.

Original language	English
Title of host publication	2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS)
Publisher	Institute of Electrical and Electronics Engineers
Pages	9-14
DOIs	https://doi.org/10.1109/ICMTS50340.2022.9898104
Publication status	E-pub ahead of print - 26 Sept 2022
Event	34th IEEE International Conference on Microelectronic Test Structures - Virtual Duration: 21 Mar 2022 → 23 Mar 2022 http://icmts.if.t.u-tokyo.ac.jp/about

Conference

Conference	34th IEEE International Conference on Microelectronic Test Structures
Abbreviated title	34th ICMTS Conference
Period	21/03/22 → 23/03/22
Internet address	http://icmts.if.t.u-tokyo.ac.jp/about

Access to Document

10.1109/ICMTS50340.2022.9898104

2022040115Accepted author manuscript, 13.7 MB

Implantable Microsystems for Personalised Anti-Cancer Therapy
Murray, A., Smith, S. & Walton, A.
EPSRC
27/05/13 → 31/05/19
Project: Research

Cite this

Dunare, C., Zhang, S., Marland, J., Tsiamis, A., Sullivan, P., Underwood, I., Terry, J. G., Walton, A. J., & Smith, S. (2022). Test Structures for Characterising the Fabrication of Miniature Reference Electrodes. In 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) (pp. 9-14). Institute of Electrical and Electronics Engineers. Advance online publication. https://doi.org/10.1109/ICMTS50340.2022.9898104

@inproceedings{83d2af900a8c4c8fa2c12f46d23496e9,

title = "Test Structures for Characterising the Fabrication of Miniature Reference Electrodes",

abstract = "Robust and reliable micro-scale integrated electro- chemical sensors need a reference electrode that can provide a stable electrochemical potential. This can be achieved using a silver/silver chloride (Ag/AgCl) electrode, produced by the chemical chlorination of a thin patterned silver layer. Well understood and controlled processes are required to produce the Ag/AgCl electrode. This paper shows how previously reported test structures have been used to characterise and inform the fabrica- tion procedure. Wafer mapping of these structures was carried out using a Python controlled measurement system, consisting of a semi-automatic prober connected to an HP4062UX based analyser. The measurements were analysed to determine whether the chlorination process was affected by the test structure geometry. This was found to have no clear effect on chlorination.",

author = "Camelia Dunare and Shan Zhang and Jamie Marland and Andreas Tsiamis and Paul Sullivan and Ian Underwood and Terry, {Jonathan G.} and Walton, {Anthony J.} and Stewart Smith",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 34th IEEE International Conference on Microelectronic Test Structures, 34th ICMTS Conference ; Conference date: 21-03-2022 Through 23-03-2022",

year = "2022",

month = sep,

day = "26",

doi = "10.1109/ICMTS50340.2022.9898104",

language = "English",

pages = "9--14",

booktitle = "2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS)",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

url = "http://icmts.if.t.u-tokyo.ac.jp/about",

}

Dunare, C, Zhang, S, Marland, J , Tsiamis, A, Sullivan, P, Underwood, I , Terry, JG, Walton, AJ & Smith, S 2022, Test Structures for Characterising the Fabrication of Miniature Reference Electrodes. in 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers, pp. 9-14, 34th IEEE International Conference on Microelectronic Test Structures, 21/03/22. https://doi.org/10.1109/ICMTS50340.2022.9898104

Test Structures for Characterising the Fabrication of Miniature Reference Electrodes. / Dunare, Camelia; Zhang, Shan; Marland, Jamie et al.
2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers, 2022. p. 9-14.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Test Structures for Characterising the Fabrication of Miniature Reference Electrodes

AU - Dunare, Camelia

AU - Zhang, Shan

AU - Marland, Jamie

AU - Tsiamis, Andreas

AU - Sullivan, Paul

AU - Underwood, Ian

AU - Terry, Jonathan G.

AU - Walton, Anthony J.

AU - Smith, Stewart

PY - 2022/9/26

Y1 - 2022/9/26

N2 - Robust and reliable micro-scale integrated electro- chemical sensors need a reference electrode that can provide a stable electrochemical potential. This can be achieved using a silver/silver chloride (Ag/AgCl) electrode, produced by the chemical chlorination of a thin patterned silver layer. Well understood and controlled processes are required to produce the Ag/AgCl electrode. This paper shows how previously reported test structures have been used to characterise and inform the fabrica- tion procedure. Wafer mapping of these structures was carried out using a Python controlled measurement system, consisting of a semi-automatic prober connected to an HP4062UX based analyser. The measurements were analysed to determine whether the chlorination process was affected by the test structure geometry. This was found to have no clear effect on chlorination.

AB - Robust and reliable micro-scale integrated electro- chemical sensors need a reference electrode that can provide a stable electrochemical potential. This can be achieved using a silver/silver chloride (Ag/AgCl) electrode, produced by the chemical chlorination of a thin patterned silver layer. Well understood and controlled processes are required to produce the Ag/AgCl electrode. This paper shows how previously reported test structures have been used to characterise and inform the fabrica- tion procedure. Wafer mapping of these structures was carried out using a Python controlled measurement system, consisting of a semi-automatic prober connected to an HP4062UX based analyser. The measurements were analysed to determine whether the chlorination process was affected by the test structure geometry. This was found to have no clear effect on chlorination.

U2 - 10.1109/ICMTS50340.2022.9898104

DO - 10.1109/ICMTS50340.2022.9898104

M3 - Conference contribution

SP - 9

EP - 14

BT - 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS)

PB - Institute of Electrical and Electronics Engineers

T2 - 34th IEEE International Conference on Microelectronic Test Structures

Y2 - 21 March 2022 through 23 March 2022

ER -

Test Structures for Characterising the Fabrication of Miniature Reference Electrodes

Abstract / Description of output

Conference

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