Test Structures for Characterising the Fabrication of Miniature Reference Electrodes

Camelia Dunare, Shan Zhang, Jamie Marland, Andreas Tsiamis, Paul Sullivan, Ian Underwood, Jonathan G. Terry, Anthony J. Walton, Stewart Smith

Research output: Contribution to conferencePaperpeer-review

Abstract

Robust and reliable micro-scale integrated electro- chemical sensors need a reference electrode that can provide a stable electrochemical potential. This can be achieved using a silver/silver chloride (Ag/AgCl) electrode, produced by the chemical chlorination of a thin patterned silver layer. Well understood and controlled processes are required to produce the Ag/AgCl electrode. This paper shows how previously reported test structures have been used to characterise and inform the fabrica- tion procedure. Wafer mapping of these structures was carried out using a Python controlled measurement system, consisting of a semi-automatic prober connected to an HP4062UX based analyser. The measurements were analysed to determine whether the chlorination process was affected by the test structure geometry. This was found to have no clear effect on chlorination.
Original languageEnglish
Pages9-14
Publication statusPublished - Apr 2022
Event34th IEEE International Conference on Microelectronic Test Structures - Virtual
Duration: 21 Mar 202223 Mar 2022
http://icmts.if.t.u-tokyo.ac.jp/about

Conference

Conference34th IEEE International Conference on Microelectronic Test Structures
Abbreviated title34th ICMTS Conference
Period21/03/2223/03/22
Internet address

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