Test Structures for Characterising the Integration of EWOD and SAW Technologies for Microfluidics

Y. Li, Y. Q. Fu, Brian Flynn, W. Parkes, Y. Liu, S. Brodie, Jonathan Terry, Leslie Haworth, Andrew Bunting, Tom Stevenson, Stewart Smith, Anthony Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents details of the design and fabrication of test structures specifically designed for the characterisation of two distinct digital microfluidic technologies: Electro-Wetting On Dielectric (EWOD) and Surface Acoustic Wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterise enhanced droplet manipulation as well as other integrated functions. In particular, we detail the use of EWOD to anchor droplets while SAW excitation is applied to perform mixing.
Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Microelectronic Test Structures (ICMTS10)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages52-57
Number of pages6
ISBN (Print)978-1-4244-6915-4
DOIs
Publication statusPublished - 25 Mar 2010

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