Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication

Camelia Dunare; James Marland; Ewen Blair; Andreas Tsiamis; Fiona Moore; Jonathan Terry; Anthony Walton; Stewart Smith

doi:10.1109/ICMTS.2019.8730966

Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication

Camelia Dunare, James Marland, Ewen Blair, Andreas Tsiamis, Fiona Moore, Jonathan Terry, Anthony Walton, Stewart Smith

School of Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated elec- trochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/AgCl) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Microelectronics Test Structures
Publisher	Institute of Electrical and Electronics Engineers
Pages	58-63
Number of pages	6
ISBN (Print)	9780107281-1464-4
DOIs	https://doi.org/10.1109/ICMTS.2019.8730966
Publication status	Published - 6 Jun 2019
Event	32nd IEEE International Conference on Microelectronic Test Structures - Kitakyushu International Conference Center, Fukuoka, Japan Duration: 18 Mar 2019 → 21 Mar 2019 Conference number: 32

Conference

Conference	32nd IEEE International Conference on Microelectronic Test Structures
Abbreviated title	ICMTS 2019
Country/Territory	Japan
City	Fukuoka
Period	18/03/19 → 21/03/19

Access to Document

10.1109/ICMTS.2019.8730966

New_Version_Corrected_2Accepted author manuscript, 7.09 MB

Implantable Microsystems for Personalised Anti-Cancer Therapy
Murray, A., Smith, S. & Walton, A.
EPSRC
27/05/13 → 31/05/19
Project: Research

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Dunare, C., Marland, J., Blair, E., Tsiamis, A., Moore, F., Terry, J., Walton, A., & Smith, S. (2019). Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication. In 2019 IEEE 32nd International Conference on Microelectronics Test Structures (pp. 58-63). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ICMTS.2019.8730966

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title = "Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication",

abstract = "Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated elec- trochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/AgCl) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.",

author = "Camelia Dunare and James Marland and Ewen Blair and Andreas Tsiamis and Fiona Moore and Jonathan Terry and Anthony Walton and Stewart Smith",

note = "Acceptance date set to exclude from REF OA Policy; 32nd IEEE International Conference on Microelectronic Test Structures, ICMTS 2019 ; Conference date: 18-03-2019 Through 21-03-2019",

year = "2019",

month = jun,

day = "6",

doi = "10.1109/ICMTS.2019.8730966",

language = "English",

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pages = "58--63",

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publisher = "Institute of Electrical and Electronics Engineers",

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Dunare, C, Marland, J, Blair, E, Tsiamis, A, Moore, F, Terry, J, Walton, A & Smith, S 2019, Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication. in 2019 IEEE 32nd International Conference on Microelectronics Test Structures. Institute of Electrical and Electronics Engineers, pp. 58-63, 32nd IEEE International Conference on Microelectronic Test Structures, Fukuoka, Japan, 18/03/19. https://doi.org/10.1109/ICMTS.2019.8730966

Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication. / Dunare, Camelia; Marland, James; Blair, Ewen et al.
2019 IEEE 32nd International Conference on Microelectronics Test Structures. Institute of Electrical and Electronics Engineers, 2019. p. 58-63.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication

AU - Dunare, Camelia

AU - Marland, James

AU - Blair, Ewen

AU - Tsiamis, Andreas

AU - Moore, Fiona

AU - Terry, Jonathan

AU - Walton, Anthony

AU - Smith, Stewart

N1 - Conference code: 32

PY - 2019/6/6

Y1 - 2019/6/6

N2 - Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated elec- trochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/AgCl) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.

AB - Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated elec- trochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/AgCl) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.

U2 - 10.1109/ICMTS.2019.8730966

DO - 10.1109/ICMTS.2019.8730966

M3 - Conference contribution

SN - 9780107281-1464-4

SP - 58

EP - 63

BT - 2019 IEEE 32nd International Conference on Microelectronics Test Structures

PB - Institute of Electrical and Electronics Engineers

T2 - 32nd IEEE International Conference on Microelectronic Test Structures

Y2 - 18 March 2019 through 21 March 2019

ER -

Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication

Abstract

Conference

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Implantable Microsystems for Personalised Anti-Cancer Therapy

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