Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication

Camelia Dunare, James Marland, Ewen Blair, Andreas Tsiamis, Fiona Moore, Jonathan Terry, Anthony Walton, Stewart Smith

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated elec- trochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/AgCl) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.
Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Microelectronics Test Structures
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages58-63
Number of pages6
ISBN (Print)9780107281-1464-4
DOIs
Publication statusPublished - 6 Jun 2019
Event32nd IEEE International Conference on Microelectronic Test Structures - Kitakyushu International Conference Center, Fukuoka, Japan
Duration: 18 Mar 201921 Mar 2019
Conference number: 32

Conference

Conference32nd IEEE International Conference on Microelectronic Test Structures
Abbreviated titleICMTS 2019
Country/TerritoryJapan
CityFukuoka
Period18/03/1921/03/19

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