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Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated elec- trochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/AgCl) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.
|Title of host publication||2019 IEEE 32nd International Conference on Microelectronics Test Structures|
|Publisher||Institute of Electrical and Electronics Engineers (IEEE)|
|Number of pages||6|
|Publication status||Published - 6 Jun 2019|
|Event||32nd IEEE International Conference on Microelectronic Test Structures - Kitakyushu International Conference Center, Fukuoka, Japan|
Duration: 18 Mar 2019 → 21 Mar 2019
Conference number: 32
|Conference||32nd IEEE International Conference on Microelectronic Test Structures|
|Abbreviated title||ICMTS 2019|
|Period||18/03/19 → 21/03/19|
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- 1 Finished
27/05/13 → 31/05/19