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Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.
|Pages||145 - 149|
|Number of pages||5|
|Publication status||Published - 28 Mar 2017|
|Event||International Conference on Microelectronic Test Structures - Grenoble, France|
Duration: 28 Mar 2017 → 30 Mar 2017
|Conference||International Conference on Microelectronic Test Structures|
|Period||28/03/17 → 30/03/17|
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