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Abstract
Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.
Original language | English |
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Pages | 145 - 149 |
Number of pages | 5 |
Publication status | Published - 28 Mar 2017 |
Event | International Conference on Microelectronic Test Structures - Grenoble, France Duration: 28 Mar 2017 → 30 Mar 2017 |
Conference
Conference | International Conference on Microelectronic Test Structures |
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Abbreviated title | ICMTS |
Country/Territory | France |
City | Grenoble |
Period | 28/03/17 → 30/03/17 |
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Dive into the research topics of 'Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor'. Together they form a unique fingerprint.Projects
- 1 Finished
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Implantable Microsystems for Personalised Anti-Cancer Therapy
Murray, A., Smith, S. & Walton, A.
27/05/13 → 31/05/19
Project: Research