Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor

Jamie Marland, Camelia Dunare, Andreas Tsiamis, González-Fernández, Eva, Ewen Blair, Stewart Smith, Jonathan Terry, Alan Murray, Anthony Walton

Research output: Contribution to conferencePaperpeer-review

Abstract

Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.
Original languageEnglish
Pages145 - 149
Number of pages5
Publication statusPublished - 28 Mar 2017
EventInternational Conference on Microelectronic Test Structures - Grenoble, France
Duration: 28 Mar 201730 Mar 2017

Conference

ConferenceInternational Conference on Microelectronic Test Structures
Abbreviated titleICMTS
CountryFrance
CityGrenoble
Period28/03/1730/03/17

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