Test Structures for the Characterisation of Conductive Carbon Produced from Photoresist

Simone Scarfi, Stewart Smith, A Tabasnikov, Ilka Schmueser, Ewen Blair, Andrew Bunting, Anthony Walton, Alan Murray, Jonathan Terry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2016 International Conference on Microelectronic Test Structures (ICMTS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages6
ISBN (Print)978-1-4673-8791-0
Publication statusPublished - 29 Mar 2016

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