Test structures for the Characterisation of MEMS and CMOS Integration technology

H. Lin, Anthony Walton, Tom Stevenson, Stewart Smith

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)140-147
Number of pages8
JournalIEEE Transactions on Semiconductor Manufacturing
Volume21/2
Publication statusPublished - 1 May 2008

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